Applications

Below are some applications that have been automated using the Fastmatics family of products:

40 Channel Vacuum heating chamber
Closed loop control of 40 heater loops used for baking and back filling high reliability fiber optic interface modules.

Deposition system
Production based vacuum deposition chamber, over 150 IO points, one axis of motion.  Software allowed for Maintenance level operation and fully automated runs.  Pre-defined recipe set stored in a library allowed for fast selection and change of process runs via GUI with data logging and safety interlocks.  Closed loop heater control, CVD system. 

Vacuum deposition chamber
This was a single chamber vacuum deposition system, over 250 IO points and four axis of motion and was designed as a research tool for PVD.  The automation software allowed for Maintenance level operation as well as fully automated runs.  Recipe design, storage and run via GUI with data logging and safety interlocks were included.   Transfer of samples via software controlled linear rack and pinion allowed complete hands off processing of multiple samples.  The tool was used to develop new magnetic thin films.

Vacuum deposition chamber
Single chamber vacuum deposition system, over 250 IO points and two axis of motion used as a research tool for making components used in the defense industry.  Software allowed for Maintenance level operation as well as fully automated runs.  Recipe design, storage and run via GUI with data logging and safety interlocks.  This system contained a vertical planetary / satellite type motion controlled both together and individually allowed for precise placement of samples in the process chamber along with excellent uniformity.

UHV Vacuum deposition chamber, System 1
Single chamber vacuum deposition system, over 250 IO points and four axis of motion used as a research tool for making magnetic thin films PVD.  The software allowed for Maintenance level operation as well as fully automated runs.  Recipe design, storage and run via GUI with data logging and safety interlocks.  Transfer of samples via software controlled linear rack and pinion allowed complete hands off processing of multiple samples.

Vacuum deposition chamber, System 2
Single chamber vacuum deposition system, over 250 IO points and four axis of motion used as a research tool for making computer components.  Software allowed for Maintenance level operation as well as fully automated runs.  Recipe design, storage and run via GUI with data logging and safety interlocks.  Transfer of samples via software controlled linear rack and pinion allowed complete hands off processing of multiple samples.

PVD Vacuum deposition chamber, system 3
Single chamber vacuum deposition system, over 300 IO points and four axis of motion used as a research tool for making computer components.  Software allowed for Maintenance level operation as well as fully automated runs.  Recipe design, storage and run via GUI with data logging and safety interlocks.  Transfer of samples via software controlled robotic arm allowed complete hands off processing of multiple samples.  The software contained multiple user database with password protection for widely varying recipe libraries.

Brooks Robot base Cluster Tool deposition system
This system is an eight chamber robotically controlled vacuum deposition system.  Technologies include CVD (plastic like materials), CVD Metals, PVD sputtering, plasma clean, multiple load locks with 10 wafers each and masking system.  This system contained over 1500 IO points, a total of six axis of motion, and approximately 15 channels of closed loop deposition control, combined manual and automatic control, robotic sample transfer and was used as the work horse of research for many years.  The software enabled recipe design, storage and run via GUI with data logging and safety interlocks. This system used a single computer architecture to run the entire cluster tool.  

Six chamber robot based vacuum deposition chamber
Six chamber cluster tool vacuum deposition system, over 1000 IO points, a total of nine axis of motion, robotic sample transfer used as a research tool for the development of new materials/films.  Software allowed for Maintenance level operation as well as fully automated runs.  Recipe design, storage and run via GUI with data logging and safety interlocks.  Included individual chamber processes as well as multiple chamber work cell execution of recipes, entirely run by Procerius, Inc. Fastmatics.  Mixed advance technologies were deployed in the multi-chamber system including automated chambers, a manually run chamber, and a 6 wafer load lock.  The software included graphical display of user selected data logged IO points as well as text file.  This system runs the latest version of Fastmatics in the multi-module mode of operation.

Aerosol Collector
An embedded computer controller running Fastmatics and Procerius, Inc. produced PLC was provided by Procerius, Inc.   The system has more than 60 IO points and collects air samples for detection of unwanted contaminants.   This system was battery operated the Procerius, Inc. PLC was a low power PLC solution combined with a very low power PC based controller along with our Fastmatics™ platform to reduce software development costs.  The software development cost was more than 50% less with Fastmatics over the traditional embedded programming approach, in addition the software allows for complete development and on the fly change of system operation to evaluate new modes of operation.

EPI cluster tool add on module
The system interfaced with the EPI robot wafer handler and worked cooperatively with in a robot multi-chamber system.  The add on module was fully automated and enabled recipe control within the automated sequences of the robot system.   The system included 2 axes of motion control, deposition control, and interface with numerous vacuum system components.  

Furnace system
for mixing gasses in R&D environment.  This product used Fastmatics and Procerius, Inc. produced PLC hardware.

For additional applications information, please contact our sales department.

In addition you can review a few of the reference letters that we have received from our customers.